NanoLab@TU/e is the open access clean room facility of the Eindhoven University of Technology. The clean room Is open for internal as well as external users from institutes and companies. We are specialized in Micro/Nano Photonics and nano structuring. We have specialized equipment for epitaxial growth (MBE and MOVPE), lithography (EBL, DUV scanner, stepper), plasma tools (ICP RIE, ALD, (ICP)PECVD) and lot of characterization tools (SEM, CD SEM, XRD, XPS etc).